Layer termination from ellipsometric knowledge is absolutely built-in into Aeres®. Many different multi-wavelength and spectroscopic ellipsometry options can be found Together with the ion beam sputter deposition technique.

In-situ optical checking and Manage is obtainable via Angstrom’s optical monitoring & Handle deal.

An optional cryogenic pump enhances foundation strain and pumping pace and may be isolated with the chamber for the duration of reactive processes with oxygen.

The size, position, and kit ratio of each World are optimized to provide the best possible attainable movie thickness uniformity.

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Variable angle phases make it possible for for quite strong slender film techniques. However, certainly one of its biggest difficulties is reproducibility. The substrate is often set at a very oblique angle in relation into the resource, as well as the movies are very delicate to the precision of this angle.

Angstrom Engineering® patterns and engineers Every single Reticle® System to offer our companions in the optics Local community the chance to create the movies they have to have with fantastic purity, density, and uniformity, all within a hugely repeatable and automatic manner.

Our exclusive design and style permits direct or oblique monitoring on the variable angle stage, removing the need for tooling aspects or even a witness glass changer. Learn more with regard to the Optical Titanium for deposition processes Monitoring & Command offer below.

IBSD processes can also hire a secondary ion supply for substrate cleaning and energetic assist, substrate heating for reactive deposition, and in-situ optical monitoring or ellipsometry for vital layer thickness termination. 

All common Reticle® platforms involve an extra gridless finish-Hall ion source with hollow cathode neutralizer.

1 degree. All those wonderfully slender tolerances make it possible for us to repeatedly build pretty specific nanostructures. I can say wholeheartedly the merchandise and service Angstrom Engineering® sent has been incredible.

Self-aligned ion optics are configured especially for the desired deposition necessities and geometry within your process.

Angstrom Engineering’s Reticle® units provide a switch-key solution for people planning to notice any optical design and style into a superior-efficiency movie.

A shuttered QCM Positioned near the substrate gives opinions within the deposition level and Bodily thickness in the growing film.

Considerate style and design with the ion beam focusing optics confines the beam fully to the region of the target, eradicating any danger of contamination.